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High-Performance Ceramic Target for Thin-Film and Optical Coating Applications
Cell Lab 3N (99.9%) Zirconium Oxide (ZrO₂) Sputtering Target is a high-purity ceramic target designed for thin-film deposition, optical coatings, and semiconductor manufacturing. With its exceptional hardness, high melting point, and excellent chemical stability, zirconium oxide provides superior film adhesion and uniformity across various substrates.
It is widely used in electronic ceramics, optical filters, fuel cells, and surface engineering, where durability and purity are critical for performance.
High Purity 99.9% (Higher Available) – Low impurity levels ensure clean and stable sputtering.
Excellent Thermal and Chemical Stability – Withstands temperatures up to 4,300 °C without degradation.
Superior Film Quality – Produces dense, adherent coatings with excellent optical transparency.
Customisable Dimensions – Available in disc, plate, or rectangular formats up to Ø200 mm.
Optional Backing Plate – Copper with indium bonding available upon request; not included by default.
| Parameter | Specification | 
|---|---|
| Material | Zirconium Oxide | 
| Chemical Formula | ZrO₂ | 
| CAS Number | 1314-23-4 | 
| Purity | 99.9% (Higher purities available upon request) | 
| Molar Mass | 123.22 g/mol | 
| Density | 5.68 g/cm³ | 
| Melting Point | 4,300 °C | 
| Shape Options | Discs, Rectangle, Step, Plate, Sheet, Rod, Custom-made | 
| Available Dimensions | Max Ø200 mm, Length 300 mm, Width 200 mm, Thickness 1 mm or custom | 
| Backing Plate Option | Copper with Indium Bonding (optional, not included by default) | 
| Element | Concentration (ppm) | 
|---|---|
| Fe | 203 | 
| Si | 142 | 
| Ca | 40 | 
| Mg | 12 | 
| W | 46 | 
| Al | 60 | 
| Cu | 69 | 
Optical Coatings – Ideal for anti-reflective and dielectric mirror coatings.
Semiconductors – Used in insulating layers and diffusion barriers.
Energy & Fuel Cells – Functions as an electrolyte or barrier layer in SOFC systems.
Protective Coatings – Enhances wear resistance in aerospace and engineering components.
Research & Development – Widely applied in material science and surface engineering studies.
Q1: Is the copper backing plate included in the standard product?
No. The Cu backing plate with indium bonding is optional and must be ordered separately.
Q2: Can higher purities than 99.9% be supplied?
Yes. Higher purities (up to 99.999%) are available upon request.
Q3: What shapes and sizes can be customised?
Cell Lab can fabricate discs, plates, and rectangles up to Ø200 mm or 300 mm in length, depending on system requirements.
Q4: Is this target compatible with DC or RF sputtering?
Yes. It is suitable for both DC and RF magnetron sputtering systems.
You may return most new, unopened items within 30 days of delivery for a full refund. We'll also pay the return shipping costs if the return is a result of our error (you received an incorrect or defective item, etc.).
You should expect to receive your refund within four weeks of giving your package to the return shipper, however, in many cases you will receive a refund more quickly. This time period includes the transit time for us to receive your return from the shipper (5 to 10 business days), the time it takes us to process your return once we receive it (3 to 5 business days), and the time it takes your bank to process our refund request (5 to 10 business days).
If you need to return an item, simply login to your account, view the order using the "Complete Orders" link under the My Account menu and click the Return Item(s) button. We'll notify you via e-mail of your refund once we've received and processed the returned item.
We can ship to virtually any address in the world. Note that there are restrictions on some products, and some products cannot be shipped to international destinations.
When you place an order, we will estimate shipping and delivery dates for you based on the availability of your items and the shipping options you choose. Depending on the shipping provider you choose, shipping date estimates may appear on the shipping quotes page.
Please also note that the shipping rates for many items we sell are weight-based. The weight of any such item can be found on its detail page. To reflect the policies of the shipping companies we use, all weights will be rounded up to the next full pound.
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