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High-Purity HfO₂ for Semiconductor, Optical, and Dielectric Thin Films
Cell Lab 3N (99.9%) Hafnium Oxide (HfO₂), also known as hafnia, is a high-melting, thermally stable compound of hafnium used extensively in semiconductors, optical coatings, and dielectric films. As an electrical insulator with a band gap of 5.3–5.7 eV, HfO₂ enables the fabrication of high-κ gate dielectrics in modern CMOS devices and acts as a robust protective coating in high-temperature or plasma environments.
Its chemical inertness, high melting point (2,758 °C), and excellent transparency in the visible and infrared range make HfO₂ a preferred material for optical thin films, multilayer mirrors, and laser coatings.
High Purity (99.9%) – Ensures consistent optical and electronic performance in precision coating systems.
Excellent Dielectric Strength – Ideal for use in high-κ gate oxides and microelectronic devices.
High Melting Point (2,758 °C) – Suitable for demanding high-temperature deposition environments.
Superior Optical Transparency – Stable transmission from UV to IR wavelengths for optical coatings.
Chemical & Thermal Stability – Resists corrosion, oxidation, and degradation under vacuum conditions.
| Parameter | Specification |
|---|---|
| Name | Hafnium Oxide |
| Chemical Formula | HfO₂ |
| Product SKU | TA2251 (50 g), TA2252 (100 g), TA2253 (500 g) |
| Purity | 99.9% (3N) |
| Appearance | White, Crystalline Solid |
| Melting Point | 2,758 °C |
| Theoretical Density | 9.6 g/cm³ |
| Band Gap | 5.3–5.7 eV |
| Thermal Conductivity | Moderate |
| E-Beam Compatibility | Excellent |
| Thermal Evaporation Techniques | Boat: W or Mo; Crucible: Al₂O₃ |
| E-Beam Crucible Liner Material | Graphite, Tungsten |
Semiconductors – Used as high-κ dielectric in transistors, DRAMs, and capacitors.
Optical Coatings – Applied in mirrors, filters, and laser optics for high reflection and durability.
Protective Barriers – Provides excellent thermal and plasma resistance for industrial components.
Energy Research – Employed in photovoltaic and thermophotonic devices for thermal insulation.
Aerospace & Defence – Used in infrared optical domes and heat-resistant coatings.
Q1: Why is HfO₂ used in semiconductor applications?
Its high dielectric constant and thermal stability make it a superior alternative to SiO₂ in advanced CMOS technologies.
Q2: Can HfO₂ be used for E-beam evaporation?
Yes. HfO₂ offers excellent E-beam evaporation performance with low contamination and uniform film growth.
Q3: What are suitable crucible materials for evaporation?
Al₂O₃ crucibles and W or Mo boats are ideal for stable, repeatable deposition.
Q4: Is customisation available for laboratory or production use?
Yes. Cell Lab can supply custom quantities and purities based on research or industrial requirements.
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